Ecoplasma
Ecoplasma
- 产品详情
- 产品参数
电浆水洗式尾气(废气)处理机
保护环境是我们每个人的责任
机台类型：电浆水洗式
工艺流程：废气预热处理→涡流电浆高温裂解(2,000~10,000C°)→水
洗可溶解毒气→水洗降温排气
处理气体：PFCs Gas (CF4、SF6、NF3...)
Plasma & Wet Gas Scrubber for Etch
u Variable Plasma Power
-. 7KW ~ 20KW
u High DRE forPFC Gas
-. Low Power, High Surface Discharger : Reinforce Energy Efficiency
-. Plasma Swirl Effect: Improve Gas Mixing by Turbulence
-. Heat Conductive Lining: Waste Gas Preheating & High Energy Efficiency
u EasyMaintenance
-. Reduce PM Time
-. Long PM period to 3 months
规格：
Specifications
Dimension(W×D×H) | 800×1000×1840 mm |
Capacity | Etch(CF4): Inlet 200slm |
Plasma Torch | -. Creation Method : DC Non Transferred Arc Discharge -. Max. Power : 20 kW -. Torch Type : Rod-nozzle -. Cathode, Anode: Tungsten, OFC -. Swirling Plasma: Long Life Time |
Application | PFC or Flammable, Toxic Gas Usage Process |
Weight | 600kg |
Utility
Consumption | |
Power | 7 ~ 15 KW(AC208V) |
CDA | 120slm |
N2 | 50slm |
PCW | 15L/min |
City Water | 3L/min |
PFC Gas | |||
NF3 | SF6 | CF4 | |
DRE (%) | ≥99 | ≥98 | ≥95 |
