电浆水洗式尾气(废气)处理机
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机台类型：电浆水洗式
工艺流程：废气预热处理→涡流电浆高温裂解(2,000~10,000C°)→水
洗可溶解毒气→水洗降温排气
处理气体：PFCs Gas (CF4、SF6、NF3...)

Plasma & Wet Gas Scrubber for CVD

u  Variable Plasma Power

    -. Lower power 5KW ~ 10KW for NF3

-. 7KW ~ 20KW for N2O

u   High DRE forCVD Gas and N2O

    -. Low Power, High Surface Discharger : Reinforce Energy Efficiency

    -. Plasma Swirl Effect: Improve Gas Mixing by Turbulence

    -. High efficiency for N2O gas

u  EasyMaintenance

    -. Reduce PM Time

u WaterFlowing Wall

    -. Anti-clogging for Powder, Long PM Term

u  De-NOx

    -. Special design for NOx reduce

Specifications

Utility

DRE