EcoBurn
EcoBurn
- 产品详情
- 产品参数
燃烧水洗式尾气(废气)处理机
保护环境是我们每个人的责任
机台类型：燃烧水洗式
工艺流程：天然气高温热裂解有毒气体→涡流水冲刷腔室保持腔室低于50C°→水洗可溶解毒气→水洗降温排气
处理气体：PFCs Gas (CF4、SF6、NF3...)
Burn& Wet Gas Scrubber
u N2 Sleeve Head
-. Anti-clogging for Powder, Long PM Term
u Turbulence 3 Burning Nozzle
-. Improve Gas Mixing by Turbulence
u WaterFlowing Wall
-. Anti-clogging for Powder, Long PM Term
-. Excellent Thermal Insulation
u Easy Maintenance
-. Reduce PM Time
Specifications
Dimension(W×D×H) | 740×1000×1700 mm |
Capacity | CVD(NF3): Inlet 300slm Etch(CF4): Inlet 200slm |
Head | N2 Sleeve |
Burner | -. Turbulence 3Burning Nozzle -. INCONEL600 Material -. UV Sensor |
Reactor | -. Water Flowing Wall -. Sight Window |
Application | PFC or Flammable, Toxic Gas Usage Process |
Weight | 500kg |
Utility
Consumption | |
Power | 1 KW |
LNG | 10 ~ 25slm |
O2 | 20 ~ 50slm |
CDA | 20slm |
N2 | 30slm |
PCW | 15L/min |
City Water | 3L/min |
