加热水洗式尾气(废气)处理机

保护环境是我们每个人的责任

机台类型：加热水洗式

工艺流程：废气加热高温裂解(600~800C°)→水洗可溶解毒气→水洗降温排气处理气体：可高温裂解或氧化及可水洗废气

ECOEPI

Heat & Cooling Gas Scrubberfor MOCVD

u  No Water Consumption

    -. PCW Cooling System

u   No CDAConsumption

    -. Room Air Combustion by Blower Intake

u   Epi-optimizedHeating Chamber (MO-CVDProcess)

    -. High Efficiency for NH3, H2 ▶ Low TN(TN≤ 15ppm)

    -. 3 Zone Heater Control ▶ BackupFunction to Heater Fail

    -. Stable H2&NH3 Combustion ▶ NoBack Pressure, No Pressure Oscillation

u   EasyMaintenance

    -. Reduce PM Time

    -. Long Pm period to 6 months

u  Low NOx

    -. Double chamber low NOx design