Heated process cooling water (PCW) (exhaust gas) treatment machine -   MOCVD , EPI   , NH3   oven ,Dedicated to high hydrogen (H2) process

It is our duty to protect environment

Equipment type：Heated process cooling exhaust gas treatment machine

Process：NH3 waste gas and the carried hydrogen enter into first chamber together, under no oxygen condition high temperature pyrolysis NH3→ N+ H2, hydrogen doesn't happen any reaction in first chamber (no oxygen condition) → Infusing normal air into second chamber, and the hydrogen in first chamber reacts with carried hydrogen to form water H2+O2→ 2H2O → Exhausted water flows into water tank to reach the environmental exhausted standars   → Processing waste gas by high temperature then entering the patent cooling reaction for cooling discharge

Process Gas：NH3: 0-200slm / H2: 0-600slm

EcoEpi Gas Scrubber

DoubleChamber design

- NH3 isdecomposed to N + H2

- Catch 95% powder in1stChamber

Preheatedroom air

- Preheated combustion airby the waste heat which is generated in the process of the water gas treatment

- Decrease electricity& improve DRE.

Specialmaterial

- Prevent HIHA attack

PCWCooling chamber

- increase waste air gothrough cooling tank time.

- Catch powder to avoidpowder clogged