EcoPlasma E

EcoPlasma E

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電漿水洗式尾氣(廢氣)處理機
保護環境是我們每個人的責任

機台類型:電漿水洗式
工藝流程:廢氣預熱處理→渦流電漿高溫裂解(2,000~10,000C°)→水
洗可溶解毒氣→水洗降溫排氣
處理氣體:PFCs & HFCs Gas (CF4SF6NF3...)


Plasma & Wet Gas Scrubber

Variable Plasma Power

- 6KW ~ 20KW

High DRE for PFCs & HFCs Gas

- Low Power, High Surface Discharger : Reinforce Energy Efficiency

- Plasma Swirl Effect: Improve Gas Mixing by Turbulence

- Heat Conductive Lining: Waste Gas Preheating & High Energy Efficiency

EasyMaintenance

- Reduce PM Time

- Long PM period to 3 months


SERIES / 系列
Plasma 電漿系列
APPLICABLE / 適用制程
Etch 低粉塵製程, PFCs & HFC Gas , 特氣房氣瓶櫃適用
EQUIPMENT MODEL / 設備型號
EcoPlasma-E
CAPACITY / 處理能力
500slm