Plasma & Wet Gas Scrubber for CVD
It is our duty to protect environment.

Equipment tyep：Plasma

* Variable Plasma Power

     - Lower power 5KW ~ 10KW for NF3

       - 7KW~20KW for N2O

* High DRE for PFCs & HFCs Gas

     - Low Power, High SurfaceDischarger : Reinforce Energy Efficiency

       - Plasma Swirl Effect: Improve GasMixing by Turbulence

       - High efficiency for N2Ogas

* Easy Maintenance

     - Reduce PM Time

* Water Flowing Wall

     - Anti-clogging for Powder, LongPM Term

* De-NOx

     - Special design for NOx reduce