加熱式製程冷卻水(PCW)(廢氣)處理機 - MOCVD , EPI , NH3 烤箱 , 高氫氣(H2)製程專用

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機台類型：加熱式製程水冷卻式廢氣處理機

工藝流程：NH3廢氣與載流氫氣一同進入第一腔室, 在無氧狀態下高溫裂解 NH3→ N + H2, 氫氣於第一腔室內部不做任何反應 (無氧狀態) → 在第二腔室內注入一般空氣於第一腔室反應成的 氫氣與載流氣體氫氣做反應成水 H2+O2→ 2H2O → 廢水流入水箱達到環保排放標準 → 高溫已處理廢氣進入專利冷卻反應式做冷卻排放

處理氣體：NH3: 0-200slm / H2: 0-600slm

EcoEpi Gas Scrubber

Double Chamber design

- NH3 is decomposed to N + H2

- Catch 95% powder in 1stChamber

Preheated room air

- Preheated combustion air by the waste heat which is generated in the process of the water gas treatment

- Decrease electricity & improve DRE.

Special material

- Prevent HIHA attack

PCW Cooling chamber

- increase waste air go through cooling tank time.

- Catch powder to avoid powder clogged