EcoBurn

EcoBurn

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Combustion washing exhaust gasprocessor

It is our duty toprotect environment

Equipment typeCombustionwashing

Process:Natural gas pyrolysistoxic gas→Vortex water flushes chamber, at same time,it keeps the chamber lower than 50 degrees→ Dissolvedtoxic gas by washing→Water washing cooling andexhausting

處理氣體:PFCs Gas (CF4、SF6、NF3...) .....

Burn & Wet Gas Scrubber

N2 Sleeve Head

    -   Anti-cloggingfor Powder, Long PM Term

Turbulence 3Burning Nozzle

    -   Improve Gas Mixing by Turbulence

Water FlowingWall

   -   Anti-clogging for Powder, Long PM Term

    -   Excellent Thermal Insulation

Easy Maintenance

    -   Reduce PM Time


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SERIES
Burn 燃燒型
APPLICABLE
CVD Etch Diffsion 適用
EQUIPMENT MODEL
EcoBurn-500
Price
¥0.00
CAPACITY
500slm