Heated process cooling water (PCW) (exhaust gas) treatment machine-   MOCVD, EPI , NH3   oven ,   dedicated to high hydrogen(H2)process

It is our duty to protect environment

Equipment type：加Heated process cooling water exhaust gas treatment machine

Process：NH3 waste gas and carried hydrogen go into first chamber, they are under no oxygen condition to pyrolysis NH3→ N + H2, hydrogen doesn't have any reactions in first chamber (no oxygen condition) → Injecting normal air in second chamber, it will react with hydrogen and carried hydrogen which are from first chamber to form water H2+O2→ 2H2O → The waste water flows into water tank to reach the standard of environmental exhausting   → After high temperature process, waste gas goes into the patent cooling reaction for cooling and discharge

Process Gas：NH3: 0-200slm / H2: 0-600slm

EcoEpi Gas Scrubber

DoubleChamber design

- NH3 is decomposedto N + H2

- Catch 95% powder in 1stChamber

Preheatedroom air

- Preheated combustion air by the wasteheat which is generated in the process of the water gas treatment

- Decrease electricity & improveDRE.

Specialmaterial

- Prevent HIHA attack

PCWCooling chamber

- increase waste air go through coolingtank time.

- Catch powder to avoid powder clogged