Double inner chamber heating water washing (exhaust gas)treament machine - MOCVD, EPI, NH3 oven, high-flow hydrogenand dedicated for corrosive gas process (exclusive patent)
It is our duty to protect environment
Equipment type:heating water washing
Process:Heating exhaust gas to high temperature, therefore, it pyrolysises in inner and outer cavity(600~850C°)→It can soluble gas by water washing →Decreasing temperature and exhaust by water
Process gas:NH3: 0-200slm / H2: 0-600slm
Model | EcoEpi2500-W | EcoEpi3200-W |
Application | Acid Gas Usage Epi Process(MO-CVD in LED FAB) | |
Inlet Capacity | H2-400slm, NH3-200slm | H2-500slm, NH3-300slm |
Dimension (mm) | W1000 × D1150 × H1850 | W1100 × D1300 × H1920 |