EcoEpi-Wet

EcoEpi-Wet

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Double inner chamber heating water washing (exhaust gas)treament machine - MOCVD, EPI, NH3 oven, high-flow hydrogenand dedicated for corrosive gas process (exclusive patent)

It is our duty to protect environment

Equipment type:heating water washing

Process:Heating exhaust gas to high temperature, therefore, it pyrolysises in inner and outer cavity(600~850C°)→It can soluble gas by water washing →Decreasing temperature and exhaust by water

Process gas:NH3: 0-200slm / H2: 0-600slm



Model

EcoEpi2500-W

EcoEpi3200-W

Application

Acid   Gas Usage Epi Process(MO-CVD in LED FAB)

Inlet   Capacity

H2-400slm,   NH3-200slm

H2-500slm,   NH3-300slm

Dimension   (mm)

W1000   × D1150 × H1850

W1100   × D1300 × H1920



SERIES
Thermal 電加熱
APPLICABLE
MOCVD, EPI, 外延製程,NH3烤箱適用
EQUIPMENT MODEL
EcoEpi-Wet
Price
¥0.00
CAPACITY
1600, 2500, 3200slm