Plasma Water Washing tail gas (exhaust gas) treatment machine
It is our duty to protect enviornment

Equipment tyep：Plasma Water Washing
Process：Pre-heating exhaust gas → Vortext plasma pyrolysis(2,000~10,000C°)→ It can soluble gas by water washing →Decreasing temperature and exhaust by water
Process Gas：PFCs Gas (CF4、SF6、NF3...) & N2O....

Plasma& Wet Gas Scrubber for CVD & Matel Etch & PAD Etch

* Variable Plasma Power

     - Lower power 5KW ~ 10KW for NF3

    - 6KW ~ 20KW for N2O

* High DRE for CVD Gas and N2O

    - Low Power, High Surface Discharger : Reinforce EnergyEfficiency

     - Plasma Swirl Effect: Improve Gas Mixing byTurbulence

    - High efficiency for N2O gas

* Easy Maintenance

    - Reduce PM Time

* Water Flowing Wall

    - Anti-clogging for Powder, Long PM Time

* De-NOx   

    - Special design for NOx reduction

Plasma Water Washing tail gas (exhaust gas) treatment machine
It is our duty to protect environment

Equipment type：Plasma   Water Washing
Process: Pre-heating exhaust gas → Vortext plasma pyrolysis(2,000~10,000C°)→ It can soluble gas by water washing →Decreasing temperature and exhaust by water
Process Gas：PFCs & HFCs Gas (CF4、SF6、NF3...)

Plasma & Wet Gas Scrubber

Variable Plasma Power

- 6KW ~20KW

High DRE for PFCs & HFCs Gas

- LowPower, High Surface Discharger : Reinforce Energy Efficiency

- Plasma Swirl Effect: Improve Gas Mixing byTurbulence

- Heat Conductive Lining: Waste Gas Preheating& High Energy Efficiency

EasyMaintenance

- Reduce PM Time