EcoEpi

EcoEpi

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Heated process cooling water (PCW) (exhaust gas) treatment machine -   MOCVD , EPI   , NH3   oven ,Dedicated to high hydrogen (H2) process

It is our duty to protect environment

Equipment type:Heated process cooling exhaust gas treatment machine

Process:NH3 waste gas and the carried hydrogen enter into first chamber together, under no oxygen condition high temperature pyrolysis NH3→ N+ H2, hydrogen doesn't happen any reaction in first chamber (no oxygen condition) → Infusing normal air into second chamber, and the hydrogen in first chamber reacts with carried hydrogen to form water H2+O2→ 2H2O → Exhausted water flows into water tank to reach the environmental exhausted standars   → Processing waste gas by high temperature then entering the patent cooling reaction for cooling discharge

Process Gas:NH3: 0-200slm / H2: 0-600slm

EcoEpi Gas Scrubber

DoubleChamber design

- NH3 isdecomposed to N + H2

- Catch 95% powder in1stChamber

Preheatedroom air

- Preheated combustion airby the waste heat which is generated in the process of the water gas treatment

- Decrease electricity& improve DRE.

Specialmaterial

- Prevent HIHA attack

PCWCooling chamber

- increase waste air gothrough cooling tank time.

- Catch powder to avoidpowder clogged

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SERIES
Thermal 電加熱
APPLICABLE
MOCVD, EPI, 外延製程,NH3烤箱適用
EQUIPMENT MODEL
EcoEpi500, 1600, 2500, 3200
Price
¥0.00
CAPACITY
H2: 0~600slm, NH3: 0~200slm